Microsystem Technology. Wolfgang Menz

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Название: Microsystem Technology

Автор: Wolfgang Menz

Издательство: John Wiley & Sons Limited

Жанр: Техническая литература

Серия:

isbn: 9783527613014

isbn: 0

Аннотация:

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.