Measurement Technology for Micro-Nanometer Devices. Zongmin Ma

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Название: Measurement Technology for Micro-Nanometer Devices

Автор: Zongmin Ma

Издательство: John Wiley & Sons Limited

Жанр: Техническая литература

Серия:

isbn: 9781118717981

isbn: 0

Аннотация:

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices