Lithography. Stefan Landis

Скачать книгу в различных форматах или читать онлайн на сайте.

Название: Lithography

Автор: Stefan Landis

Издательство: John Wiley & Sons Limited

Жанр: Техническая литература

Серия:

isbn: 9781118621233

isbn: 0

Аннотация:

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.