Название: Silicon Technologies. Ion Implantation and Thermal Treatment
Автор: Annie Baudrant
Издательство: John Wiley & Sons Limited
Жанр: Техническая литература
isbn: 9781118601112
isbn: 0
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.