Enabling Technologies for MEMS and Nanodevices. Advanced Micro and Nanosystems. Oliver Brand

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Название: Enabling Technologies for MEMS and Nanodevices. Advanced Micro and Nanosystems

Автор: Oliver Brand

Издательство: John Wiley & Sons Limited

Жанр: Техническая литература

Серия:

isbn: 9783527675043

isbn: 0

Аннотация:

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.