Resonant MEMS. Fundamentals, Implementation, and Application. Oliver Brand

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Название: Resonant MEMS. Fundamentals, Implementation, and Application

Автор: Oliver Brand

Издательство: John Wiley & Sons Limited

Жанр: Техническая литература

Серия:

isbn: 9783527676361

isbn: 0

Аннотация:

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.